Nano Thermal Sensor

Nano thermal sensors, or more technically called nanometric partially-depleted CMOS (complementary metal-oxide-semiconductor) SOI (Silicon on insulator) transistors and lateral diodes, are used in low-cost and low-power thermal sensory. These sensors require a small chip area and exhibit high sensitivity over the entire temperature range, including higher temperatures. Due to the short thermal time constant of the electrons in the transistor's channel, it is possible to measure the channel's instantaneous heating and pinpoint the local temperature of the transistor. This allows accurate remote temperature sensing while no additional calibration is needed. Applications can be seen in different sectors, such as mining environment monitoring to real-time sensing in respiratory devices.